Integrated circuit containing polysilicon gate transistors and fully silicidized metal gate transistors

ABSTRACT

A method for manufacturing an integrated circuit  10  having transistors  20, 30  of two threshold voltages where protected transistor stacks  270  have a gate protection layer  220  that are formed with the use of a single additional mask step. Also, an integrated circuit  10  having at least one polysilicon gate transistor  20  and at least one FUSI metal gate transistor  30.

BACKGROUND OF THE INVENTION

This invention relates to the fabrication and structure of integratedcircuits containing both polysilicon gate transistors and fullysilicidized (“FUSI”) metal gate transistors.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a cross-sectional view of an integrated circuit in accordancewith the present invention.

FIGS. 2A-2N are cross-sectional diagrams of a process for forming a polygate transistor and a FUSI gate transistor in accordance with thepresent invention.

FIGS. 3A-3I are cross-sectional diagrams of a process for forming a polygate transistor and a FUSI gate transistor in accordance with thepresent invention using an alternate process flow.

FIGS. 4A-4I are cross-sectional diagrams of a process for formingprotected and unprotected transistor stacks in accordance with thepresent invention.

DETAILED DESCRIPTION OF THE INVENTION

The present invention is described with reference to the attachedfigures, wherein like reference numerals are used throughout the figuresto designate similar or equivalent elements. The figures are not drawnto scale and they are provided merely ti illustrate the invention.Several aspects of the invention are described below with reference toexample applications for illustration. It should be understood thatnumerous specific details, relationships, and methods are set forth toprovide a full understanding of the invention. One skilled in the art,however, will readily recognize that the invention can be practicedwithout one or more of the specific details or with other methods. Inother instances, well-known structures or operations are not shown indetail to avoid obscuring the invention. The present invention is notlimited by the illustrated ordering of acts or events, as some acts mayoccur in different orders and/or concurrently with other acts or events.Furthermore, not all illustrated acts or events are required toimplement a methodology in accordance with the present invention.

Referring to the drawings, FIG. 1 is a cross-sectional view of anintegrated circuit 10 in accordance with the present invention. In theexample application, CMOS transistors 20, 30 are formed within an n-wellor p-well region 40 of a semiconductor substrate 50. It is within thescope of the invention for the remainder of the integrated circuit 10 tocontain any combination of additional active or passive devices (notshown), such as additional MOSFET, BiCMOS and bipolar junctiontransistors, capacitors, optoelectronic devices, inductors, resistors,or diodes.

The semiconductor substrate 50 is a single-crystalline substrate that isdoped to be n-type or p-type; however, it may be an amorphous siliconsubstrate or a substrate that is fabricated by forming an epitaxialsilicon layer on a single-crystal substrate. The CMOS transistors 20, 30are electrically insulated from other active devices by shallow trenchisolation structures 60 formed within the semiconductor substrate 50;however, any conventional isolation structures may be used such as fieldoxide regions or implanted isolation regions.

In general, transistors 20, 30 are comprised of a gate, source, anddrain. More specifically, as shown in FIG. 1, the active portion of thetransistors are comprised of sources/drains 70, source/drain extensions80, and a gate that is comprised of a gate oxide 90 and gate electrode100/110. The CMOS transistors 20, 30 may be either a p-channel MOStransistor (“PMOS”) or an n-channel MOS transistor (“NMOS”).

In the example application shown in FIG. 1, transistors 20 and 30 arePMOS transistors. Therefore they are formed within an n-well region 40of the semiconductor substrate 50. In addition, the deep sources anddrains 70 and the source and drain extensions 80 have p-type dopantssuch as boron. The sources/drains 70 are usually heavily doped. However,the source/drain extensions 80 may be lightly doped (“LDD”), mediumdoped (“MDD”), or highly doped (“HDD”).

The gates of the PMOS transistors 20, 30 are created from a gate oxidedielectric 90 plus a p-type doped polysilicon gate electrode 100 or afully silicidized gate electrode 110 (“FUSI”). This use of bothpolysilicon gate electrodes 100 and fully silicidized gate electrodes110 in the same integrated circuit accommodates circuit designsrequiring transistors that have one of two threshold voltages on thesame integrated circuit.

One skilled in the art understands that the transistors 20, 30 couldalso be NMOS transistors without departing from the scope of theinvention. In this alternative embodiment each of the dopant typesdescribed throughout the remainder of this document would be reversed.For example, NMOS transistors 20, 30 would be formed within a p-wellregion 40 of the semiconductor substrate 50. In addition, the deepsources and drains 70 and the source and drain extensions 80 would haven-type dopants such as arsenic, phophorous, antimony, or a combinationof n-type dopants. The sources/drains 70 of NMOS transistors 20, 30would also be heavily doped. However, the source/drain extensions 80could be LDD, MDD, or HDD. The gate of the NMOS transistors would becreated from a gate oxide dielectric 90 plus a p-type doped polysilicongate electrode 100 or a fully silicidized gate electrode 110. Forclarity, this opposite structure will not be discussed in detail sinceit is well known how to reverse the dopant types to create an NMOStransistor that is the counterpart to the PMOS transistor describedherein.

Referring again to FIG. 1, an offset structure comprising extensionsidewalks 120 and spacer sidewalls 130 are used during fabrication toenable the proper placement of the source/drain extensions 80 and thesources/drains 70, respectively. More specifically, the source/drainextensions 80 are usually formed using the gate stack (90, 100/110) andthe extension sidewalls 120 as a mask. In addition, the sources/drains70 are usually formed with the gate stack (90, 100/110) and the spacersidewalls 130 as a mask.

In this example application, the sources/drains 70 have a layer ofsilicide 140 that is formed within the top surface of the sources/drains70 during the fabrication process (as described below). The silicidelayer 140 formed within the top surface of the sources/drains 70 ispreferably CoSi₂; however, it is within the scope of the invention tofabricate the silicide 140 with other metals (such as nickel, platinum,titanium, tantalum, molybdenum, tungsten, or alloys of these metals). Inaddition, the silicide layer 140 formed on the top surface of thesources/drains 70 may be a self-aligned silicide (i.e. a “salicide”).

In accordance with the invention, the gate electrodes 100/110 are eitherpartially or fully silicidized during the semiconductor fabricationprocess described below. More specifically, the polysilicon gatetransistor 20 has a partially silicidized gate electrode 100 while thefully silicidized metal gate transistor 30 has a gate electrode 110 thatis fully silicidized. A benefit of the silicide formed within the gateelectrodes 100/110 and the top portion of the sources/drains 70 is thereduction of the contact resistance between the transistors 20, 30 andthe electrical contacts 160/170. In the example application, thepolycrystalline silicon (i.e. “polysilicon” or “poly”) gate electrode100 is preferably CoSi₂; however, it is within the scope of theinvention to fabricate the silicide 100 with other metals (such asnickel, platinum, titanium, tantalum, molybdenum, tungsten, or alloys ofthese metals). In contrast, the FUSI gate electrode silicide 110 ispreferably comprised of NiSi; however, other metals may be used, such ascobalt, platinum, titanium, tantalum, molybdenum, tungsten, or an alloy.

The integrated circuit 10 has a layer of dielectric insulation 150 thatsurrounds the CMOS transistors 20, 30. The composition of dielectricinsulation 150 may be suitable material such as SiO₂ or organosilicateglass (“OSG”). The dielectric material 150 electrically insulates themetal contacts 160/170 that electrically connect the CMOS transistors20, 30 that are shown in FIG. 1 to other active or passive devices (notshown) that are located throughout the integrated circuit 10. Anoptional dielectric liner (not shown) may be formed immediately belowthe dielectric insulation layer 150. If used, the dielectric liner maybe any suitable material such as silicon nitride.

In this example application, the contact cores 160 are comprised of W;however, any suitable material (such as Cu, Ti, Al, or an alloy) may beused. In addition, an optional dielectric liner material 170 such as Ti,TiN, or Ta (or any combination or layer stack thereof) may be used toreduce the contact resistance at the interface between the liner 170 andthe silicidized regions of the poly gate electrode 100 andsources/drains 140.

Subsequent fabrication will create “back-end” portion 180 of theintegrated circuit. The back-end 180 is generally comprised of one ormore interconnect layers (and possibly via layers) containing metalinterconnects 190 that properly route electrical signals and powerthroughout the completed integrated circuit. The metal interconnects 190may contain any suitable metal such as copper. In addition, the metalinterconnects 190 are electrically insulated by dielectric material 200,which may be any insulative material such as fluorinated silica glass(“FSG”) or OSG. Moreover, a thin dielectric layer 210 may be formedbetween the areas of dielectric material 200 of each interconnect layer.If used, the thin dielectric layer 200 may be comprised of any suitablematerial, such as SiC, SiCN, SiCO, or Si₃N₄. The very top portion of theback-end 180 (not shown) contains bond pads to connect the integratedcircuit 10 to the device package plus an overcoat layer to seal theintegrated circuit 10.

Referring again to the drawings, FIGS. 2A-2N are cross-sectional viewsof a partially fabricated integrated circuit 10 illustrating a processfor forming example PMOS transistors 20, 30 in accordance with thepresent invention. As noted above, those skilled in the art ofsemiconductor fabrication will easily understand how to modify thisprocess to manufacture other types of transistors (such as NMOStransistors) in accordance with this invention.

FIG. 2A is a cross-sectional view of the integrated circuit 10 whereexample PMOS transistors 20, 30 will be formed. The integrated circuit10 contains the shallow trench isolation structures 60, the gate oxidelayer 95, and the gate electrode layer 105, which are formed on the topsurface of the n-well region 40 a semiconductor substrate 50. In theexample application, the semiconductor substrate 50 is silicon; howeverany suitable material such as silicon germanium, germanium, or galliumarsenide may be used. The shallow trench isolation structures 60 areformed using any suitable known process.

The gate oxide layer 95 and the gate electrode layer 105 are also formedusing well-known manufacturing techniques. The first layer formed overthe surface of the semiconductor substrate 50 is a gate oxide layer 95.As an example, the gate oxide layer 95 is silicon dioxide that is formedwith a thermal oxidation process. However, the gate oxide layer 95 maybe any suitable material, such as nitrided silicon oxide, siliconnitride, or a high-k gate dielectric material, and it may be formedusing any one of a variety of processes such as an oxidation process,thermal nitridation, plasma nitridation, physical vapor deposition(“PVD”), chemical vapor deposition (“CVD”), or atomic layer deposition(“ALD”).

A gate electrode layer 105 is then formed on the surface of the gateoxide layer 95. The gate electrode layer 105 is comprised ofpolycrystalline silicon in the example application. However, it iswithin the scope of the invention to use other materials such as anamorphous silicon, a silicon alloy (e.g. SiGe), or other suitablematerials. The gate electrode layer 105 may be formed using any suitableprocess technique such as CVD or PVD.

The next step in the example application is the formation of a gateprotection layer 225 over the entire semiconductor wafer (i.e. over thegate electrode layer 105). Preferably, the gate protection layer isformed using a CVD process; however, any suitable process may be used.In the best mode application, the protection layer is comprised ofsilicon nitride. However, it is within the scope of the invention toform a gate protection layer 225 comprising a stack of materials, suchas SiO₂, Si_(x)N_(y), SiC, other metal nitrides, or combinations andstacks thereof. For example, the gate protection layer 225 may becomprised of silicon oxide layers above and below a silicon nitridelayer. If used, the silicon oxide layers may serve as buffers for betterprocess control.

Preferably, the gate protection layer 225 is at least 50 Å thick inorder to protect the FUSI gate electrode layer 110 from beingsilicidized or oxidized during the integrated FUSI process, as describedbelow. However, the thickness of the protection layer 225 may varybetween 50-500 Å thick. In the example application, the silicon nitridegate protection layer 225 is deposited by a rapid thermal CVD processusing silane or dichlorosilane and ammonia precursors.

A photoresist layer 230 is deposited over the gate protection layer 225in order to pattern the gate stacks for transistors 20, 30. Any suitablephotoresist material may be used during this process. Alternatively,other materials may be used as the mask layer 230, such as silicondioxide.

As shown in FIG. 2B, the photoresist layer 230 is patterned and etchedso the photoresist layer 230 covers the gate protection layer 225corresponding to the FUSI metal gate transistor 30. Then, as shown inFIG. 2C, the portions of the gate protection layer 225 not covered bythe patterned photoresist 230 are removed. Preferably, the exposedportions of the gate protection layer 225 are removed with a wet processthat uses a H₃PO₄ etchant in a wet etch chamber having a temperaturebetween 100-160° C. (but preferably at 130° C.). If oxide layers areused in the gate protection layer 225 then a wet etch process involvingHF should be employed to remove the oxide layers. The photoresist 230 isthen removed, as shown in FIG. 2C, using any suitable ashing process.

A gate stack 240 having no gate protection layer 220 (“unprotected gatestack”) and a gate stack 250 having the gate protection layer 220(“protected gate stack”) are now formed. The unprotected and protectedgate stacks, shown in FIG. 2D, may be created through a variety ofprocesses. For example, the gate stacks 240, 250 may be created byforming a layer of standard photoresist 230 over the semiconductorsubstrate, patterning the photoresist, and then using the patternedphotoresist to properly etch the gate oxide layer 95, the gate electrodelayer 105, and the protection layer 225. The gate stacks 240, 250 may beetched using any suitable etch process, such as an anistoropic etchusing plasma or reactive ions. After the pattern and etch process, anunprotected gate stack 240 having a gate oxide layer 90 and a gateelectrode layer 100 will be formed from the gate oxide layer 95, thegate electrode layer 105 respectively. In addition, a protective gatestack 250 having a gate oxide layer 90, a gate electrode layer 110, andgate protection layer 220 will be formed from the gate oxide layer 95,the gate electrode layer 105, and the gate protection layer 225respectively.

The next step in the fabrication of the PMOS transistors 20, 30 is theformation of the extension region 80 using extension sidewalls 120 as atemplate. As shown in FIG. 2E, extension sidewalls 120 are formed on theouter surface of the gate stacks using any suitable processes andmaterials. The extension sidewalls 120 may be formed from a singlematerial or may be formed from one or more than one layer of materials.For example, the extension sidewalls 120 may be comprised of an oxide,oxi-nitride, silicon dioxide, nitride, or any other dielectric materialor layered stack of dielectric materials. The layers for the extensionsidewalls 120 may be formed with any suitable process, such as thermaloxidation, or deposition by ALD, CVD, or PVD. Preferably, at least onelayer of the extension sidewall 120 is comprised of a silicon nitridethat is formed with a CVD process that uses a bis-t-butylaminosilane(“BTBAS”) precursor. Forming the silicon nitride layer with thatprecursor will help guard against the etching of the extension sidewalls120 during the process of removing the gate protection layer 220 laterin the fabrication process (due to low etch rate of BTBAS in the etchingsolution that is used for the protection layer removal). Usually, ananistoropic etch process is used to shape the extension sidewall layeror layers into the extension sidewalls 120.

The extension sidewalls 120 are now used as a template to direct theproper placement of the extension regions 80, as shown in FIG. 2E. Theextension regions 80 are formed near the top surface of thesemiconductor substrate 50 using any standard process. For example, theextension regions 80 may be formed by low-energy ion implantation, gasphase diffusion, or solid phase diffusion. The dopants used to createthe extension regions 80 for the PMOS transistors 20, 30 are p-type,such as boron. However, other dopants or combinations of dopants may beused.

At some point after the implantation of the extension regions 80, theextension regions 80 are activated by an anneal process (performed nowor later) to form source/drain extensions 80 (as shown in FIG. 2E). Thisanneal step may be performed with any suitable process such as rapidthermal anneal (“RTA”).

Referring now to FIG. 2F, spacer sidewalls 130 are now formed proximateto the extension sidewalls 120. The spacer sidewalls 130 may be formedusing any standard process and materials. In addition the spacersidewalls 130 may be formed from a single material or from two or morelayers of materials. For example, the spacer sidewalls 130 may becomprised of a cap oxide and a BTBAS nitride layer that are formed witha CVD process and subsequently anisotropically etched (preferably usingstandard anistoropic plasma etch processes). However, it is within thescope of the invention to use more layers (i.e. an L-shaped cap oxidelayer, an L-shaped nitride layer, and a final sidewall oxide layer) orless layers (i.e. just a silicon oxide layer or a silicon nitride layer)to create the spacer sidewalls 150. It is to be noted that theintegrated circuit 10 is usually subjected to a standard post-etchcleaning process after the formation of the spacer sidewalls 130. Nowthe source/drain sidewalls 130 are used as a template for theimplantation of the source/drain regions 75. The source/drain regions 75may be formed through any one of a variety of processes, such as deepion implantation or deep diffusion. The dopants used to create thesource/drain regions 75 for the PMOS transistors 20, 30 are typicallyboron; however, other dopants or combinations for dopants may be used.

In the example application, the source/drain regions 75 are activated bya second anneal step to create sources/drains 70. (However, theextension region anneal and the source/drain region anneal may becombined and performed at this point in the fabrication process.) Thisanneal step acts to repair the damage to the semiconductor wafer and toactivate the dopants. The activation anneal may be performed by anytechnique such as RTA, flash lamp annealing (“FLA”), or laser annealing.This anneal step often causes lateral and vertical migration of dopantsin the source/drain extensions 80 and the sources/drains 70, as shown inFIG. 2G.

At this point in the fabrication process there are two transistorstructures formed within the semiconductor substrate 50. Namely, anunprotected transistor stack 260 having the unprotected gate stack 240,and a protected transistor stack 270 having the protected gate stack250.

As shown in FIG. 2H, a first layer of silicidation material 280 is nowformed over the semiconductor substrate 50. The silicidation material280 is preferably comprised of cobalt; however, other suitable materialssuch as nickel, platinum, titanium, tantalum, molybdenum, tungsten, oralloys may be used. In the example application, the cobalt firstsilicidation material 280 is between 40-75 Å thick and is formed using aPVD process. Various other thicknesses could be used if the first layerof silicidation material 280 is one of the alternative metals, such asnickel.

An optional cap layer 290 may also be formed over the first layer ofsilicidation metal 280. If used, the cap layer 290 acts as a passivationlayer that prevents the diffusion of oxygen from ambient into the firstsilicidation metal layer 280. The cap layer may be any suitablematerial, such as TiN. In the example application, the cap layer 290 isbetween 150-300 Å thick.

The integrated circuit 10 is now annealed with any suitable process,such as RTA. In the example application, the RTA is performed for 10-60seconds at a temperature between 400-600° C.

This substrate silicide anneal process will cause a silicide 140 (i.e. aCo-rich silicide or Co mono-silicide) to form at the top surface of thegate electrode layer 100 of the unprotected transistor stack 260 andalso at the top surface of the sources/drains 70 of both the protectedtransistor stacks 270 and the unprotected transistor stacks 260, asshown in FIG. 2I.

It is to be noted that the silicidation metal layer 140 will only reactwith the active substrate (i.e. the exposed Si); namely, thesources/drains 70 and the exposed polysilicon gate electrode layer 100.Therefore, the silicide 140 formed by the annealing process is asalicide. It is also important to note that the gate electrode 110 wasnot modified by the anneal process because the gate electrode 110 wasprotected by the gate protection layer 220 and the extension sidewalls120.

The next step is the removal of the unreacted portions of the firstlayer of silicidation material 280, as shown in FIG. 2J. The first layerof the silicidation material 280 (and the capping layer 290, if used) isremoved with any suitable process such as a wet etch process (i.e. usinga fluid mixture of sulfuric acid, hydrogen peroxide, and water).

It is within the scope of the invention to perform a second RTA at thispoint in the manufacturing process in order to further react thesilicide 140 with the sources/drains 70 and the gate electrode layer100. In the example application, a second silicide anneal is performedfor 10-60 seconds at a temperature between 650-800° C. If the initialanneal process did not complete the silicidation process, this secondanneal will ensure the formation of a mono-silicide CoSi, which lowersthe sheet resistance of the silicide 140. It should be noted that thepreferred temperature and time period for the second RTA process shouldbe based on the silicide material used and the ability to form thesilicidized sources/drains 70 and gate electrode 100 to the desireddepth.

The gate protection layer 220 is now removed, as shown in FIG. 2K. Thegate protection layer 220 may be removed by any suitable process such asa wet etch using a solution containing phosphoric acid at elevatedtemperatures in the range of 100-160° C. Alternately, the gateprotection layer can be removed by using a dilute HF solution at roomtemperature (i.e. 23° C.). With the gate protection layer 220 removed,the gate electrode 110 is now exposed and therefore available for gateelectrode silicidation.

As shown in FIG. 2L, a second layer of silicidation metal 300 is nowformed over the top of the semiconductor substrate 50. The second layerof silicidation metal 300 is preferably comprised of nickel, othersuitable materials such as cobalt, platinum, titanium, tantalum,molybdenum, tungsten, or an alloy may be used. Preferably, the secondlayer of silicidation metal 300 is designed to fully silicidize thepolysilicon gate electrode layer 110. As it takes approximately 10 Å ofnickel to fully silicidize approximately 18 Å of polysilicon, thethickness of the silicidation metal 300 should be at least 56% of thethickness of the polysilicon gate electrode 110. To be comfortablehowever, it is suggested that the thickness of the silicidation metal300 should be at least 60% of the thickness of the polysilicon gateelectrode 110. Thus, where the thickness of the polysilicon gateelectrode 110 range from 600 Å to about 1500 Å in the exampleapplication, the thickness of the nickel second layer of silicidationmetal 300 should range from approximately 400-2000 Å. However, variousother thicknesses would be proper if the second layer of silicidationmetal 300 is one of the alternative metal materials.

An optional cap layer 290 may also be used over the second layer ofsilicidation metal 300. If used, the cap layer 290 acts as a passivationlayer that prevents the diffusion of oxygen from ambient into the secondlayer of silicidation metal 300. The cap layer may be any suitablematerial, such as TiN or Ti. In the example application, the cap layer290 is between 150-300 Å thick.

The integrated circuit 10 is now annealed with any suitable process,such as RTA. In the example application, the gate silicide anneal isperformed for 10-60 seconds at a temperature between 200-500° C. Oncethe first RTA of the gate silicide anneal is complete, the gateelectrode 110 should be almost fully silicidized to a metal-rich phase,as shown in FIG. 2M. It is to be noted that the second layer ofsilicidation metal 300 will not react with the silicidizedsources/drains 70 and the silicidized surface of the gate electrodelayer 100 because they are protected from further silicidation by theirpreviously formed silicide layer 140.

The next step is the removal of the unreacted portions of the secondlayer of silicidation metal 300, as shown in FIG. 2N. The second layerof silicidation metal 300 (and the capping layer 290, if used) isremoved with any suitable process such as a selective wet etch process(i.e. using a fluid mixture of sulfuric acid, hydrogen peroxide, andwater).

In the example application a second RTA is performed at this point inthe manufacturing process in order to fully react the gate silicide 110,as shown in FIG. 2N. Preferably, the second RTA is performed for 30-120seconds at a temperature between 400-600° C. This second anneal willensure the formation of a fully silicidized gate electrode layer 110having a lowered sheet resistance.

It is to be noted that the example fabrication process described abovecreates transistors having two different threshold voltages on the sameintegrated circuit 10. Specifically the poly gate transistors 20 willhave one threshold voltage (that is determined by the doping levels ofthe polysilicon gate electrode 100 during the formation of thesources/drains and the source/drain extensions) and the FUSI gatetransistors 30 will have a second (different) threshold voltage (that isdetermined by the work-function of the FUSI gate electrode). (Thework-function of the FUSI gate transistors 30 will also be affected bythe doping levels of the gate electrode 110 during the deposition of thesources/drains and the source/drain extensions).

It is to be noted that only one additional mask step (FIGS. 2A-2C) wasused to create transistors with and without the gate protection layer220 for both electrical parities (e.g. for NMOS and PMOS). It is withinthe scope of the invention to form multiple poly gate transistors 20 andmultiple FUSI gate transistors 30 in the n-well regions, the p-wellregions, or both the n-well and the p-well regions of the integratedcircuit 10.

Other process flows for creating poly gate transistors 20 and FUSI gatetransistors 30 in a single integrated circuit 10 are within the scope ofthe invention. For example, instead of forming the poly gate transistors20 first and the FUSI gate transistors second; these transistors may beformed in the opposite order. A portion of this alternative process flowis shown in FIGS. 3A-3I. With this alternative manufacturing process,protected transistor stacks 270 and unprotected transistor stacks 260may be formed using the process described above and shown in FIGS.2A-2G. Next, as shown in FIG. 3A, a silicide blocking layer is formedover the active substrate (i.e. the exposed Si). More specifically, anoxide layer 310 is formed within the top surface of the gate electrodelayer 100 of the unprotected transistor stack 260 and also within thetop surface of the sources/drains 70 of both the protected transistorstacks 270 and unprotected transistor stacks 260. Any suitabletechniques may be used to form the oxide layers 310. For instance, a lowtemperature oxidation process (e.g. a plasma oxidation process) may beperformed within a low temperature range (i.e. 200° C. to 600° C.) togrow an oxide layer having a thickness between 50-100 Å. This processhas the benefit of not changing the doping profile of the sources/drains70 and the source/drain extensions 80.

After the oxide layer 310 has been formed, the gate protection layer 220is removed from the protected gate stack 270, as shown in FIG. 3B. Thegate protection layer 220 may be removed by any suitable process such asa wet etch using a solution containing phosphoric acid at elevatedtemperatures in the range of 100-160° C. With the gate protection layer220 removed, the gate electrode 110 is now exposed and thereforeavailable for gate electrode silicidation. The oxide layer 310 is notaffected by the wet etch process to remove the gate protection layer220. Therefore, transistor stack 260 is still covered by the oxide layer310.

As shown in FIG. 3C, a first layer of silicidation metal 280 is nowformed over the top of the semiconductor substrate 50. The first layerof silicidation metal 280 is preferably comprised of nickel; however,other suitable materials such as cobalt, platinum, titanium, tantalum,molybdenum, tungsten, or an alloy may be used. Preferably, the firstlayer of silicidation metal 280 is designed to fully silicidize thepolysilicon gate electrode layer 110. As it takes approximately 10 Å ofnickel to fully silicidize approximately 18 Å of polysilicon, thethickness of the silicidation metal 280 should be at least 56% of thethickness of the polysilicon gate electrode 110. To be comfortablehowever, it is suggested that the thickness of the silicidation metal280 should be at least 60% of the thickness of the polysilicon gateelectrode 110. Thus, where the thickness of the polysilicon gateelectrode 110 range from about 600-1500 Å, in the example application,the thickness of the nickel first layer of silicidation metal 280 shouldrange from approximately 400-2000 Å. However, various other thicknesseswould be proper if the first layer of silicidation metal 280 is one ofthe alternative metals.

An optional cap layer 290 may also be used over the first layer ofsilicidation metal 280. If used, the cap layer 290 acts as a passivationlayer that prevents the diffusion of oxygen from ambient into the firstlayer of silicidation metal 280. The cap layer may be any suitablematerial, such as TiN or Ti. In the example application, the cap layer290 is between 150-300 Å thick.

The integrated circuit 10 is now annealed with any suitable process,such as RTA. In the example application, the gate silicide anneal isperformed for 10-60 seconds at a temperature between 200-500° C. Oncethe first RTA of the gate silicide anneal is complete, the gateelectrode 110 should be almost fully silicidized to a metal-rich phase,as shown in FIG. 3D. It is to be noted that the first layer ofsilicidation metal 280 will not react with the oxidized sources/drains70 and the oxidized surface of the gate electrode layer 100 because theyare protected from silicidation by the previously formed oxide layer310.

The next step is the removal of the unreacted portions of the firstlayer of silicidation metal 280, as shown in FIG. 3E. The first layer ofsilicidation metal 280 (and the capping layer 290, if used) is removedwith any suitable process such as a selective wet etch process (i.e.using a fluid mixture of sulfuric acid, hydrogen peroxide, and water).

In the example application a second RTA is performed in order to fullyreact the gate silicide 110, as shown in FIG. 3G. Preferably, the secondRTA is performed for 30-120 seconds at a temperature between 400-600° C.This second anneal will ensure the formation of a fully silicidized gateelectrode layer 110 having a lowered sheet resistance.

Now, the oxide layer 310 is also removed, as shown in FIG. 3F, using anysuitable process. For example, the oxide layer may be removed with adilute HF solution at room temperature. As shown in FIG. 3F, recesseswill be formed at the locations where the oxide layers 310 were removed.Therefore, it is within the scope of this invention to form a silicideblocking layer 310 that won't consume active silicon (thereby creatingthe recesses when etched) by using other techniques and materials, suchas a high temperature oxidation technique (i.e. a rapid thermaloxidation technique). Alternatively, a selective thin epitaxial siliconlayer may be deposited just prior to the formation of the oxide layer310 to provide a sacrificial silicon layer to compensate for the siliconconsumed by forming the oxide layer 310 with a low temperature oxidationprocess.

As shown in FIG. 3G, a second layer of silicidation material 300 is nowformed over the semiconductor substrate 50. The silicidation material300 is preferably comprised of nickel; however, other suitable materialssuch as cobalt, platinum, titanium, tantalum, molybdenum, tungsten, oralloys may be used. In the example application, the nickel secondsilicidation metal layer 300 is between 50-120 Å thick and is formedusing a PVD process. Various other thicknesses could be used if thesecond layer of silicidation material 300 is one of the alternativemetals, such as cobalt.

An optional cap layer 290 may also be formed over the second layer ofsilicidation metal 300. If used, the cap layer 290 acts as a passivationlayer that prevents the diffusion of oxygen from ambient into the secondsilicidation metal layer 300. The cap layer may be any suitablematerial, such as TiN. In the example application, the cap layer 290 isbetween 150-300 Å thick.

The integrated circuit 10 is now annealed with any suitable process,such as RTA. In the example application, the RTA is performed for 10-60seconds at a temperature between 200-500° C.

This substrate silicide anneal process will cause a silicide 140 (i.e. aNi-rich silicide or Ni mono-silicide) to form at the top surface of thegate electrode layer 100 of the unprotected transistor stack 260 andalso at the top surface of the sources/drains 70 of both the protectedtransistor stacks 270 and the unprotected transistor stacks 260, asshown in FIG. 3H.

It is to be noted that the silicidation metal layer 140 will only reactwith the active substrate (i.e. the exposed Si); namely, thesources/drains 70 and the exposed polysilicon gate electrode layer 100.Therefore, the silicide 140 formed by the annealing process is asalicide. It is also important to note that the gate electrode 110 wasnot modified by the anneal process because the gate electrode 110 wasalready fully silicidized.

The next step is the removal of the unreacted portions of the secondlayer of silicidation metal 300, as shown in FIG. 3I. The second layerof silicidation metal 300 (and the capping layer 290, if used) isremoved with any suitable process such as a selective wet etch process(i.e. using a fluid mixture of sulfuric acid, hydrogen peroxide, andwater).

It is within the scope of the invention to perform a second RTA at thispoint in the manufacturing process in order to further react thesilicide 140 with the sources/drains 70 and the gate electrode layer100. In the example application, a second silicide anneal is performedfor 10-60 seconds at a temperature between 300-600° C. If the initialanneal process did not complete the silicidation process, this secondanneal will ensure the formation of a mono-silicide NiSi, which lowersthe sheet resistance of the silicide 140. It should be noted that thepreferred temperature and time period for the second RTA process shouldbe based on the silicide material used and the ability to form thesilicidized sources/drains 70 and gate electrode 100 to the desireddepth.

After the formation of FUSI gate electrode 110, as well as the silicidelayers within the source/drain 70 and the gate electrode 100, using anyprocess flow described above, the fabrication of the integrated circuit10 now continues, using standard process steps, until the integratedcircuit is complete. Generally, the next step is the formation of thedielectric insulator 150 (see FIG. 1) using plasma-enhanced chemicalvapor deposition (“PECVD”) or another suitable process. The dielectricinsulator 150 may be comprised of any suitable material such as SiO₂ orOSG.

The contacts 160/170 are formed by etching the dielectric insulatorlayer 150 to expose the desired gate, source and/or drain. The etchedspaces are usually filled with a contact liner 170 to improve theelectrical interface between the silicide and the contact core 160. Thencontact cores 160 are formed within the liner 170; creating theelectrical interconnections between various electrical componentslocated within the semiconductor substrate 50.

The fabrication of the integrated circuit continues with the with thefabrication of the back-end structure using any suitable well-knownprocesses. Once the fabrication process is complete, the integratedcircuit 10 will be tested and then cut from the semiconductor wafer andpackaged.

Various additional modifications to the invention as described above arewithin the scope of the claimed invention. For example, instead offorming the protected and unprotected transistor stacks as describedabove in relation to FIGS. 2A-2G, the protected and unprotectedtransistor stacks may be formed with any suitable process that uses onlyone additional mask step, such as the process shown in FIGS. 4A-4I.Analogous reference numbers to those used in prior drawing FIGS. 1-3Iare used in FIGS. 4A-4I.

FIG. 4A is a cross sectional view of the integrated circuit 10 whereexample PMOS transistors 20, 30 will be formed. The integrated circuit10 contains the shallow trench isolation structures 60, the gate oxidelayer 95, and the gate electrode layer 105, which are formed on the topsurface of the n-well region 40 a semiconductor substrate 50. In theexample application, the semiconductor substrate 50 is silicon; howeverany suitable material such as silicon germanium, germanium, or galliumarsenide may be used. The shallow trench isolation structures 60 areformed using any suitable known process.

The gate oxide layer 95 and the gate electrode layer 105 are also formedusing well-known manufacturing techniques. The first layer formed overthe surface of the semiconductor substrate 50 is a gate oxide layer 95.As an example, the gate oxide layer 95 is silicon dioxide that is formedwith a thermal oxidation process. However, the gate oxide layer 95 maybe any suitable material, such as nitrided silicon oxide, siliconnitride, or a high-k gate dielectric material, and it may be formedusing any one of a variety of processes such as an oxidation process,thermal nitridation, plasma nitridation, PVD), CVD), or ALD).

A gate electrode layer 105 is then formed on the surface of the gateoxide layer 95. The gate electrode layer 105 is comprised ofpolycrystalline silicon in the example application. However, it iswithin the scope of the invention to use other materials such as anamorphous silicon, a silicon alloy (e.g. SiGe), or other suitablematerials. The gate electrode layer 105 may be formed using any suitableprocess technique such as CVD or PVD.

The next step in the example application is the formation of a gateprotection layer 225 over the entire semiconductor wafer (i.e. over thegate electrode layer 105). Preferably, the gate protection layer isformed using a CVD process; however, any suitable process may be used.Preferably, the protection layer is comprised of silicon nitride.However, it is within the scope of the invention to form a gateprotection layer 225 comprising a stack of materials, such as SiO₂,Si_(x)N_(y), SiC, other metal nitrides, or combinations and stacksthereof. For example, the gate protection layer 225 may be comprised ofsilicon oxide layers above and below a silicon nitride layer. If used,the silicon oxide layers may serve as buffers for better processcontrol.

Preferably, the gate protection layer 225 is at least 50 Å thick inorder to protect the FUSI gate electrode layer 110 from beingsilicidized or oxidized during the integrated FUSI process, as describedbelow. However, the thickness of the protection layer 225 may varybetween 50-500 Å thick. In the example application, the silicon nitridegate protection layer 225 is deposited by a rapid thermal CVD processusing silane or dichlorosilane and ammonia precursors.

The gate stack 240 for the unprotected transistor stack 260 and the gatestack 250 for the protected transistor stack 270 are now formed. Theunprotected and protected gate stacks, shown in FIG. 4B, may be createdthrough a variety of processes. For example, the gate stacks 240, 250may be created by forming a layer of standard photoresist 230 over thesemiconductor substrate, patterning the photoresist, and then using thepatterned photoresist to properly etch the gate oxide layer 95, the gateelectrode layer 105, and the protection layer 225. The gate stacks 240,250 may be etched using any suitable etch process, such as ananistoropic etch using plasma or reactive ions. After the pattern andetch process, a protected gate stack 250 having a gate oxide layer 90, agate electrode layer 110, and gate protection layer 220 will be formedfrom the gate oxide layer 95, the gate electrode layer 105, and the gateprotection layer 225 respectively. Similarly, an unprotective gate stack240 having a gate oxide layer 90, a gate electrode layer 110, and gateprotection layer 220 will be formed from the gate oxide layer 95, thegate electrode layer 105, and the gate protection layer 225respectively.

The next step in the fabrication of the PMOS transistors 20, 30 is theformation of the extension region 80 using extension sidewalls 120 as atemplate. As shown in FIG. 4C, extension sidewalls 120 are formed on theouter surface of the gate stacks using any suitable processes andmaterials. The extension sidewalls 120 may be formed from a singlematerial or may be formed from one or more than one layer of materials.For example, the extension sidewalls 120 may be comprised of an oxide,oxi-nitride, silicon dioxide, nitride, or any other dielectric materialor layered stack of dielectric materials. The layers for the extensionsidewalls 120 may be formed with any suitable process, such as thermaloxidation, or deposition by ALD, CVD, or PVD. Preferably, at least onelayer of the extension sidewall 120 is comprised of a silicon nitridethat is formed with a CVD process that uses a BTBAS precursor. Formingthe silicon nitride layer with that precursor will help guard againstthe etching of the extension sidewalls 120 during the process ofremoving the gate protection layer 220 later in the fabrication process(due to low etch rate of BTBAS in the etching solution that is used forthe protection layer removal). Usually, an anistoropic etch process isused to shape the extension sidewall layer or layers into the extensionsidewalls 120.

The extension sidewalls 120 are now used as a template to direct theproper placement of the extension regions 80, as shown in FIG. 4C. Theextension regions 80 are formed near the top surface of thesemiconductor substrate 50 using any standard process. For example, theextension regions 80 may be formed by low-energy ion implantation, gasphase diffusion, or solid phase diffusion. The dopants used to createthe extension regions 80 for the PMOS transistors 20, 30 are p-type,such as boron. However, other dopants or combinations of dopants may beused.

At some point after the implantation of the extension regions 80, theextension regions 80 are activated by an anneal process (performed nowor later) to form source/drain extensions 80 (as shown in FIG. 4C). Thisanneal step may be performed with any suitable process such as rapidthermal anneal RTA.

Referring now to FIG. 4D, spacer sidewalls 130 are now formed proximateto the extension sidewalls 120. The spacer sidewalls 130 may be formedusing any standard process and materials. In addition the spacersidewalls 130 may be formed from a single material or from two or morelayers of materials. For example, the spacer sidewalls 130 may becomprised of a cap oxide and a BTBAS nitride layer that are formed witha CVD process and subsequently anisotropically etched (preferably usingstandard anistoropic plasma etch processes). However, it is within thescope of the invention to use more layers (i.e. an L-shaped cap oxidelayer, an L-shaped nitride layer, and a final sidewall oxide layer) orless layers (i.e. just a silicon oxide layer or a silicon nitride layer)to create the spacer sidewalls 150. It is to be noted that theintegrated circuit 10 is usually subjected to a standard post-etchcleaning process after the formation of the spacer sidewalls 130.

Now the source/drain sidewalls 130 are used as a template for theimplantation of the source/drain regions 75. The source/drain regions 75may be formed through any one of a variety of processes, such as deepion implantation or deep diffusion. The dopants used to create thesource/drain regions 75 for the PMOS transistors 20, 30 are typicallyboron; however, other dopants or combinations for dopants may be used.

In the example application, the source/drain regions 75 are activated bya second anneal step to create sources/drains 70. (However, theextension region anneal and the source/drain region anneal may becombined and performed at this point in the fabrication process.) Thisanneal step acts to repair the damage to the semiconductor wafer and toactivate the dopants. The activation anneal may be performed by anytechnique such as RTA, FLA, or laser annealing. This anneal step oftencauses lateral and vertical migration of dopants in the source/drainextensions 80 and the sources/drains 70, as shown in FIG. 4E.

As shown in FIG. 4F, a photoresist layer 230 is now formed over thesemiconductor substrate 50. Any suitable photoresist material may beused during this process. Alternatively, other materials may be used asthe mask layer 230, such as silicon dioxide. This single mask step willfacilitate the formation of all protected transistor stacks 270 andunprotected transistor stacks 260 throughout the integrated circuit 10.

As shown in FIG. 4G, the photoresist layer 230 is patterned and etchedso the photoresist layer 230 covers the PMOS FUSI metal gate transistor30. Alternatively, the photoresist layer could be patterned to coverjust the gate protection layer 225 overlying the FUSI metal gatetransistor 30 (i.e. 230 a, as indicated by the dashed lines). Then, asshown in FIG. 4H, the portions of the gate protection layer 225 notcovered by the patterned photoresist 230 or 230 a (specifically, thegate protection layers 225 belonging to the unprotected transistorstacks 260) are removed. Preferably, the exposed portions of the gateprotection layer 225 are removed with a wet process that uses a H₃PO₄etchant in a wet etch chamber having a temperature between 100-160° C.(and preferably around 130° C.). If oxide layers are used in the gateprotection layer 225 then a wet etch process involving HF should beemployed to remove the oxide layers. Next, the photoresist 230 isremoved, as shown in FIG. 4I, using any suitable ashing process.

At this point in the fabrication process there are two transistorstructures formed within the semiconductor substrate 50. Namely, anunprotected transistor stack 260 having the unprotected gate stack 240,and a protected transistor stack 270 having the protected gate stack250. The fabrication of the integrated circuit now continues with theprocess step corresponding to FIG. 2H or the process step correspondingto FIG. 3A.

Various additional modifications to the invention as described above arewithin the scope of the claimed invention. As an example, interfaciallayers may be formed between any of the layers shown. In addition, ananneal process may be performed after any step in the above-describedfabrication process. When used, the anneal process can improve themicrostructure of materials and thereby improve the quality of thesemiconductor structure, Conversely, any anneal process used in theexample application may be removed. For example, if a FUSI gateelectrode can be formed with one RTA process (FIGS. 2M and 3D) then thesecond RTA step can be deleted from the process flow in order to savemanufacturing costs.

While various embodiments of the present invention have been describedabove, it should be understood that they have been presented by way ofexample only, and not limitation. Numerous changes to the disclosedembodiments can be made in accordance with the disclosure herein withoutdeparting from the spirit or scope of the invention. Thus, the breadthand scope of the present invention should not be limited by any of theabove described embodiments. Rather, the scope of the invention shouldbe defined in accordance with the following claims and theirequivalents.

1-35. (canceled)
 36. An integrated circuit comprising: at least onepolysilicon gate transistor; and at least one FUSI metal gatetransistor.
 37. The integrated circuit of claim 36 wherein said at leastone polysilicon gate transistor and said at least one FUSI metal gatetransistor are CMOS transistors.
 38. The integrated circuit of claim 36wherein said at least one polysilicon gate transistor and said at leastone FUSI metal gate transistor are PMOS transistors.
 39. The integratedcircuit of claim 36 wherein said at least one polysilicon gatetransistor and said at least one FUSI metal gate transistor are NMOStransistors.